集成后退式主动干扰排斥控制用于压电棒滑动驱动器纳米定位阶段
Keping Liu1,2, Shuai Yu1, Zhenguo Zhang3
1School of Electrical and Electronic Engineering, Changchun University of Technology, Changchun, China.
The Review of scientific instruments
|July 5, 2023
概括
这项研究引入了用于压电棒滑动驱动纳米定位阶段 (PSSNS) 的集成后退线性活性干扰排斥控制 (IB-LADRC). 在IB-LADRC提高定位精度到20纳米以下,即使与外部干扰和负载变化.
科学领域:
- 机械电子和控制系统
- 纳米技术和精密工程 纳米技术和精密工程
背景情况:
- 压电棒滑驱动纳米定位阶段 (PSSNS) 为微操作提供纳米分辨率,但难以承受大距离的运行范围,易受歇斯底里和外部干扰等非线性影响.
- 在长距离的旅行中实现高精度的纳米定位仍然是微操作和先进制造的重大挑战.
研究的目的:
- 开发一个强大的控制策略PSSNS克服旅行范围和精度的局限性,由非线性因素和干扰造成的.
- 通过一种新的复合控制方法和先进的主动干扰排斥技术,提高PSSNS的定位精度和稳定性.
主要方法:
- 实施了一种综合控制策略,将步骤和扫描模式结合起来,在扫描阶段采用一个完整的反向步骤线性主动干扰排斥控制 (IB-LADRC).
- 建立了PSSNS微运动的转移函数模型,并将未建模的动态以及外部干扰视为总干扰,纳入新的系统状态变量.
- 使用线性扩展状态观察器实时估计系统状态 (位移,速度) 和总干扰,加上使用虚拟控制变量来提高性能的新控制规律.
主要成果:
- IB-LADRC战略通过模拟和实验测试在PSSNS上得到验证,证明了其在现实应用中的有效性.
- 拟议的控制器实现了低于20nm的定位精度,即使在不同的负载条件下,也始终保持这种精度.
- IB-LADRC有效估计和补偿系统不确定性和外部干扰,显著提高了纳米定位阶段的稳定性.
结论:
- 集成后退线性主动干扰排斥控制 (IB-LADRC) 为增强压电棒滑动驱动纳米定位阶段性能提供了实用和有效的解决方案.
- 这种控制策略成功地解决了与非线性和外部干扰相关的挑战,使高精度的纳米定位能够以惊人的准确性和稳定性实现.
- 开发的IB-LADRC控制器适用于要求精确和可靠的定位能力的微操作应用,即使在动态和不确定的操作环境下也是如此.
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