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Updated: Jul 24, 2025

Picometer-Precision Atomic Position Tracking through Electron Microscopy
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扫描电子显微镜的校准标准的测量和不确定性

J Fu1, M C Croarkin1, T V Vorburger1

  • 1National Institute of Standards and Technology, Gaithersburg, MD 20899-0001.

Journal of research of the National Institute of Standards and Technology
|July 5, 2023
PubMed
概括

标准参考材料484 (SRM-484) 对于校准扫描电子显微镜 (SEM) 放大效果至关重要. 本出版物详细介绍了SRM-484的方法和不确定性,使用其后续版本的数据.

关键词:
在SRM中,我们可以使用SRM.干扰仪干扰仪干扰仪精确的精确度可以说是精确的.随机错误 随机错误 是一个错误.系统错误是一个系统错误.不确定性是一种不确定性.

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