对于地震级的Sigma-Delta MEMS电容加速度计的多度自由度建模和模拟
Xuefeng Wang1, Penghao Zhang1, Shijin Ding1
1State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 200433, China.
Sensors (Basel, Switzerland)
|July 8, 2023
概括
高级机械共振降低了地震级加速度计. 一个新的多度自由度模型通过增加自然频率来评估和抑制噪音和扭曲,显著提高性能.
科学领域:
- 机械工程 机械工程
- 电气工程 电气工程
- 传感器技术 传感器技术
背景情况:
- 在地震级西格玛-三角形MEMS电容加速度计中的高阶机械共振会在高真空环境中降低性能.
- 当前的建模方法无法评估这些共振对噪声和扭曲的影响.
研究的目的:
- 开发一种新的多度自由度 (MDOF) 模型,用于评估由高阶机械共振引起的噪声和扭曲.
- 确定这些共振降低加速度计性能的机制.
- 提出一种抑制噪音和扭曲的方法.
主要方法:
- 使用模态叠加和拉格朗奇方程来导出MDOF动态方程.
- 在Simulink.建立一个第五阶电机械西格玛-三角形系统.
- 对模拟结果的分析,以了解共振效应.
- 通过自然频率增强来抑制噪声和扭曲技术的建议.
主要成果:
- MDOF模型成功地评估了由高阶机械共振引起的噪声和扭曲.
- 低频噪声从-120.5dB下降到-175.3dB,因为自然频率从130kHz增加到455kHz.
- 观察到波扭曲的显著减少.
结论:
- 拟议的MDOF模型准确地评估了高阶机械共振的影响.
- 增加高阶自然频率是抑制MEMS加速度计噪声和扭曲的有效方法.
- 这项研究为提高地震级加速度计性能提供了一条途径.
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