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一个定位平台的设计和参数识别与一个大冲击和高精度的分段镜子定位平台的设计和参数识别.

Zihao Yin1,2, Rongjie Qin1,2, Haoting Du1,2

  • 1Key Laboratory of Infrared System Detection and Imaging Technologies, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China.

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|July 8, 2023
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概括

为主动光学系统开发了一个新的并行定位平台. 该平台可实现精确的共聚焦和共相调节,分段镜子具有高冲动和分辨率.

关键词:
3-DOF平行定位平台是一个平行定位平台.活动光学是积极的光学.灵活的放大机制的灵活放大机制大冲击和高精度的高精度.粒子群集优化 粒子群集优化

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科学领域:

  • 光学是什么?光学是什么?光学是什么?
  • 机械工程 机械工程
  • 控制系统 控制系统

背景情况:

  • 主动光学系统需要精确对准细分镜子.
  • 现有的定位系统可能缺乏必要的冲程和分辨率,用于共同聚焦和共同相位调整.

研究的目的:

  • 开发和验证为分段镜子系统提供大冲动,高精度并行定位平台.
  • 在主动光学系统中实现准确的同焦和同相调整.

主要方法:

  • 一个平行定位平台的设计,有三个灵活的腿和电容位移传感器.
  • 为压电执行器集成前置式放大机制.
  • 应用线性模型来识别放大比率.
  • 使用粒子群集优化用于控制矩阵识别.
  • 采用电容位移传感器用于精确的位置和态度测量.

主要成果:

  • 该平台实现了220微米的翻译冲动和2.0mrad的偏移冲动.
  • 证明了20nm (转换) 和0.19μrad (偏移) 的高步骤分辨率.
  • 实验结果验证了理论模型,最大偏差为5.67%.
  • 该平台在高达5公斤的负载下表现出色且稳定的性能.

结论:

  • 开发的并行定位平台满足了对分段镜子共聚焦和共相调节的严格要求.
  • 该系统为先进光学应用中超高精度定位提供了可行的解决方案.
  • 新的机械设计和先进的控制算法的结合确保了高性能和稳定性.