基于DSPI模型的开环控制器中的压电执行器启动误差的非线性特性补偿方法
Dong An1, Ji Li1, Songhua Li1
1School of Mechanical Engineering, Shenyang Jianzhu University, Shenyang 110168, China.
Micromachines
|July 8, 2023
概括
本研究使用新型数据分离Prandtl-Ishlinskii (DSPI) 模型解决了纳米定位阶段的非线性启动错误. 通过补偿这些错误,DSPI模型在开放循环控制下显著提高了定位精度.
科学领域:
- 精密机械工程 精密机械工程
- 控制系统工程 控制系统工程
- 材料科学 材料科学 材料科学
背景情况:
- 带有压电执行器的纳米定位阶段在精密工程中至关重要.
- 这些阶段的开放循环控制存在未解决的非线性启动精度问题.
- 累积的错误,特别是在开放循环条件下,限制了性能.
研究的目的:
- 分析压电纳米定位阶段启动错误的原因.
- 开发一个模型,通过解决非线性启动错误来提高定位准确性.
- 通过使用开发的模型实施前进补偿控制.
主要方法:
- 分析与材料特性和电压相关的启动错误原因.
- 采用基于经典的普兰特尔-伊斯林斯基 (CPI) 模型的数据分离的普兰特尔-伊斯林斯基 (DSPI) 模型.
- 实施DSPI反向模型用于前补偿控制.
主要成果:
- DSPI模型有效地解决了开环控制中的非线性启动错误问题.
- 与CPI模型相比,DSPI模型表现出更高的建模准确性和更高的补偿性能.
- 定位精度与CPI相比提高了99.427%,与另一个改进模型相比提高了92.763%.
结论:
- DSPI模型是纳米定位中非线性启动错误的可行解决方案.
- 这种方法显著提高了压电阶段的定位精度.
- 在精密工程应用中,DSPI模型比现有方法提供了更好的性能.
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