在微操作中建模和补偿定位错误
Miao Hao1, Bin Yang2, Changhai Ru3
1School of Mechanical and Electrical Engineering, Soochow University, Suzhou 215137, China.
Micromachines
|July 8, 2023
概括
这项研究开发了一种新的错误补偿方法,以提高微操作系统的准确性. 该方法显著减少了定位错误,提高了微妙科学任务的精度.
科学领域:
- 机器人和自动化 机器人和自动化
- 光学工程是指光学工程.
- 精确度测量 精确度测量 精确度测量
背景情况:
- 微操作系统需要高定位准确性,用于科学应用.
- 现有的系统面临来自非线性成像,摄像头错位和机械阶段不准确的错误的错误.
- 全面的错误建模对于实现亚微米精度至关重要.
研究的目的:
- 开发和验证微操作系统的新型错误补偿方法.
- 为了提高微操作操作操作的整体定位精度和可靠性.
- 解决非线性成像扭曲,摄像机安装错误和机动阶段移位错误的问题.
主要方法:
- 建立了一个全面的错误模型,包括显微镜非线性成像扭曲,摄像头安装错误和机动阶段机械位移错误.
- 提出了一种新的错误补偿方法,利用基于非线性成像模型的扭曲系数的莱文伯格-马奎特优化.
- 使用刚体翻译和图像拼接技术,为摄像头安装和机械错误推导了补偿系数.
主要成果:
- 实验验证表明,在实施补偿方法后,错误显著减少.
- 在单向运动中,位移误差控制在0.25μm以内.
- 多向运动实现了高精度,每1000微米的误差在0.02微米内.
结论:
- 开发的综合性错误模型和补偿方法有效地提高了微操作系统的定位精度.
- 拟议的技术提供了一个强大的解决方案,以尽量减少精确操纵任务中的错误.
- 取得的亚微米准确度验证了该方法在先进的科学和工业应用中的潜力.
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