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Evgenii Barbin1,2, Tamara Nesterenko1,3, Aleksei Koleda1,3

  • 1Laboratory of Intelligent Computer Systems, Tomsk State University of Control Systems and Radioelectronics, 40, Lenin Ave., 634050 Tomsk, Russia.

Micromachines
|July 8, 2023
PubMed
概括

微光电机械加速度计提供高灵敏度和噪声免疫. 改变差距的图表表现出最高的灵敏度,使它们成为精确加速测量的理想选择.