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Updated: Jul 24, 2025

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多焦激光通过空间光调制直接写作,由可扩展矢量图形指导.

Linhan Duan1, Yueqiang Zhu1, Haoxin Bai1

  • 1State Key Laboratory of Photon-Technology in Western China Energy, International Collaborative Center on Photoelectric Technology and Nano Functional Materials, Institute of Photonics & Photon Technology, Northwest University, Xi'an 710127, China.

Micromachines
|July 8, 2023
PubMed
概括

这项研究介绍了可扩展的向量图形引导的空间光调制激光直接写作 (SVG引导的SLM LDW) 以快速并行纳米制造. 这种先进的技术使得高效,灵活和高通量创建复杂的纳米结构.

关键词:
多焦点并行处理多焦点并行处理可扩展的矢量图形可扩展的矢量图形.空间光调节器空间光调节器两光子光刻 lithography 的两光子光刻 lithography 的两光子光刻 lithography 的两光子

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