基于 a-InGaZnO TFT 在正偏差应力和光照明下的表面潜力的电稳定性建模
Xiaoming Huang1, Wei Cao1, Chenyang Huang1
1College of Integrated Circuit Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China.
Micromachines
|July 8, 2023
概括
本研究提出了一种用于无形---氧化物 (a-IGZO) 薄膜晶体管 (TFT) 的新模型,用于预测应力下的电稳定性. 该模型准确地描述了在正门偏差应力和光照下设备的行为.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 半导体物理 半导体物理
背景情况:
- 无形---氧化物 (a-IGZO) 薄膜晶体管 (TFT) 对于显示技术至关重要.
- 了解压力下的电稳定性对于设备可靠性至关重要.
研究的目的:
- 在正门偏差应力 (PBS) 和轻应力下开发a-IGZO TFT的电稳定性模型.
- 准确预测a-IGZO TFT中转移曲线的演变.
主要方法:
- 提出了一个基于表面潜力的模型.
- 状态的子间隙密度 (DOSs) 是使用指数带尾和高斯深度状态来建模的.
- 表面潜能解决方案包括拉伸指数和博尔兹曼分布的缺陷和光子能量.
主要成果:
- 该模型准确地描绘了在PBS和轻应力下缺陷创建动态.
- 计算结果与具有不同DOS分布的a-IGZO TFTs的实验数据保持一致.
- 在应力条件下实现了转移曲线演变的一致表达式.
结论:
- 拟议的表面潜能模型为分析a-IGZO TFT稳定性提供了一个强大的框架.
- 该模型提高了在操作压力下设备性能的可预测性.
- 精确的建模是提高基于IGZO的电子设备可靠性的关键.
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