MEMS:

Alessandro Gemelli1, Marco Tambussi1, Samuele Fusetto1

  • 1Department of Electrical, Computer and Biomedical Engineering, University of Pavia, 27100 Pavia, Italy.

Micromachines
|July 8, 2023
PubMed
概括

微电机系统 (MEMS) 技术使得像MEMS麦克风和扬声器这样的智能,紧的声学传感器成为可能. 本次审查涵盖了它们的传导原理,性能趋势和接口集成电路 (IC).