研究一种方法来提高全加速器的温度性能
Guowen Liu1,2, Yu Liu2, Xiao Ma2
1School of Aeronautics and Astronautics, Zhejiang University, Hangzhou 310058, China.
Micromachines
|July 8, 2023
概括
这项研究通过调整带粘合比率来优化全加速度计的性能. 降低Si-SiO2与Au-Si面积比率显著降低了应力,提高了稳定性和精度.
科学领域:
- 微电机系统 (MEMS) 是指微电机系统.
- 材料科学 材料科学 材料科学
- 传感器技术 传感器技术
背景情况:
- 全加速度计点区域的应力导致非线性响应信号.
- 带中的Si-SiO2结合面积与Au-Si结合面积的比率会影响应力分布.
- 优化这种比率对于提高加速度计性能和稳定性至关重要.
研究的目的:
- 介绍一种用于提高全加速度计性能的新方法.
- 通过调整结合面积比率来消除点区域的应力.
- 调查-区域面积比对加速度计应力和稳定性的影响.
主要方法:
- 一个全加速度计模型的开发.
- 模拟分析以在不同的和面积比下生成应力图.
- 优化和区域比率的实验验证.
主要成果:
- 模拟显示,当Si-SiO2与Au-Si面积比率降至0.5.5时, anchor zone的应力显著降低.
- 实验结果表明,从133微克到46微克的最佳零偏差全温度稳定性.
- 尺度因子全温度稳定性从87ppm提高到32ppm.
结论:
- 将Si-SiO2调整为Au-Si带面积比是减少压力的有效方法.
- 优化带比率显著提高了零偏差和尺度因子的全温度稳定性.
- 该研究在零偏差稳定性方面取得了34.6%的改进,在规模因子稳定性方面取得了36.8%的改进.
关键词:
在 MEMS 加速计中,安克尔区 anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone anchor zone响应信号的响应信号的响应信号.压力取消 压力取消
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