一种电容传感方法,具有基于跨阻抗的读出电路和适应性过,用于微型陀螺
Yinyu Liu1, Youjun Zeng1, Yaochang Li2
1Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621999, China.
The Review of scientific instruments
|July 10, 2023
概括
本研究分析了微加工陀螺仪的跨阻抗放大器 (TIA) 电路,详细介绍了噪声和电容电压 (C-V) 增益. 适应性波器显著提高了信号噪声比 (SNR),提高了陀螺仪的性能.
科学领域:
- 电气工程 电气工程
- 传感器技术 传感器技术
- 微电子机械系统 (MEMS) 是一种微电子机械系统.
背景情况:
- 跨阻抗放大器 (TIA) 电路为微加工陀螺仪提供了简单而高性能的读出解决方案.
- 了解TIA电路的噪声和电容电压 (C-V) 增益特征对于优化传感器性能至关重要.
研究的目的:
- 分析微加工陀螺仪应用的TIA电路的噪声和C-V增益.
- 设计和评估一个基于TIA的读出电路,具有增强的信号噪声比 (SNR).
主要方法:
- 详细分析TIA电路噪声和C-V增益.
- 基于TIA的读出电路的设计和实验测试,C-V增益约为286dB.
- 实施自适应有限冲动响应 (FIR) 过器以改善SNR.
主要成果:
- 发现T-网络TIA配置的噪声性能较差,应该避免使用.
- 对于基于TIA的读出电路,确定了一个信号噪声比 (SNR) 极限,需要过以进行改进.
- 设计的电路在200aF变电容下达到22.8dB的SNR,通过自适应过增加到47dB.
- 实现了0.9 aF的电容传感分辨率.
结论:
- TIA 电路适合微加工陀螺仪读数,但需要谨慎设计以减轻噪声.
- 适应性过对于最大化SNR和实现高分辨率电容传感至关重要.
- 拟议的TIA和自适应过解决方案为先进的陀螺仪系统提供了一个有前途的方法.
相关概念视频
Design Example: Capacitance Multiplier Circuit
837
In integrated circuit technology, a capacitance multiplier is often utilized to produce a larger capacitance value when a small physical capacitance falls short. This is achieved by a circuit that multiplies capacitance values by a factor of up to 1000, such that a 10-pF capacitor can replicate the performance of a 100-nF capacitor.
The circuit illustrated in Figure 1 below incorporates two op-amps, with the first operating as a voltage follower and the second acting as an inverting amplifier.
The circuit illustrated in Figure 1 below incorporates two op-amps, with the first operating as a voltage follower and the second acting as an inverting amplifier.
837
Equivalent Capacitance
1.5K
Multiple capacitors can be connected in a circuit in series or parallel configuration. When the capacitor combination is connected to a battery, the potential drop across each capacitor and the magnitude of charge stored in the individual capacitor depends on the type of the connection. The capacitor combination is replaced by a single equivalent capacitor that stores the same amount of charge as the combination for a given potential difference.
The following strategies are adopted to calculate...
The following strategies are adopted to calculate...
1.5K
RC Circuits: Charging A Capacitor
3.7K
A circuit containing resistance and capacitance is called an RC circuit. A capacitor is an electrical component that stores electric charge by storing energy in an electric field. Consider a simple RC circuit having a DC (direct current) voltage source ε, a resistor R, a capacitor C, and a two-way position switch. In the circuit, the capacitor can be charged or discharged depending on the position of the switch.
When the switch is moved to connect the battery, the circuit reduces to a simple...
When the switch is moved to connect the battery, the circuit reduces to a simple...
3.7K
Spherical and Cylindrical Capacitor
5.8K
A spherical capacitor consists of two concentric conducting spherical shells of radii R1 (inner shell) and R2 (outer shell). The shells have equal and opposite charges of +Q and −Q, respectively. For an isolated conducting spherical capacitor, the radius of the outer shell can be considered to be infinite.
Conventionally, considering the symmetry, the electric field between the concentric shells of a spherical capacitor is directed radially outward. The magnitude of the field,...
Conventionally, considering the symmetry, the electric field between the concentric shells of a spherical capacitor is directed radially outward. The magnitude of the field,...
5.8K
MOS Capacitor
850
A Metal-Oxide-Semiconductor (MOS) capacitor is a fundamental structure used extensively in semiconductor device technology, particularly in the fabrication of integrated circuits and MOSFETs (metal-oxide-semiconductor field-effect transistors). The MOS capacitor consists of three layers: a metal gate, a dielectric oxide, and a semiconductor substrate.
The metal gate is typically made from highly conductive materials such as aluminum or polysilicon. Beneath the metal gate lies a thin layer of...
The metal gate is typically made from highly conductive materials such as aluminum or polysilicon. Beneath the metal gate lies a thin layer of...
850
Capacitors and Capacitance
7.7K
A device consisting of two electrical conductors that are separated by a distance and used to store electrical charges is called a capacitor. The space between the conductors is either a vacuum or an insulating material, called a dielectric. Capacitors have many applications, ranging from filtering static from radio reception to energy storage in heart defibrillators.
When the conductors are two identical parallel plates, it is called a parallel plate capacitor. When battery terminals are...
When the conductors are two identical parallel plates, it is called a parallel plate capacitor. When battery terminals are...
7.7K


