MEMS

Almir Talic1, Samir Cerimovic1, Roman Beigelbeck2

  • 1Institute of Computer Technology, Vienna University of Technology, Gußhausstraße 27-29, A-1040 Vienna, Austria.

PubMed
概括

热量计流量传感器芯片上的表面不连续性会导致流量扭曲,影响精度. 调整这些隙显著减少了流量偏差,提高了流速现场研究的准确性.