在小距离的3D像素传感器中,TCAD分析了泄漏电流和故障电压
Jixing Ye1,2, Abderrezak Boughedda1,3, D M S Sultan2
1Dipartimento di Ingegneria Industriale, Università degli Studi di Trento, 38123 Trento, Italy.
Sensors (Basel, Switzerland)
|July 11, 2023
概括
高亮度LHC的小距离3D像素传感器具有辐射硬度和高效率. TCAD模拟研究故障电压和泄漏电流,以优化传感器设计适应极端条件.
科学领域:
- 高能物理仪器仪表 高能物理仪器仪表
- 半导体设备物理学 半导体设备物理
背景情况:
- 小距离的3D像素传感器对于高亮度LHC升级 (ATLAS和CMS) 是至关重要的.
- 这些传感器具有小几何 (50x50,25x100μm2) 在p型Si-Si直接晶圆粘合基板上.
- 短的电极间距离减轻了电荷的捕获,增强了辐射硬度.
研究的目的:
- 调查小距离3D像素传感器的泄漏电流和故障行为.
- 分析高电场和辐射损伤对传感器性能的影响.
- 优化传感器几何,以提高故障电压和可靠性.
主要方法:
- 使用 TCAD (技术计算机辅助设计) 模拟,使用先进的表面和散装损坏模型.
- 将模拟结果与经照射的3D二极管 (高达1.5x10^16neq/cm2的中子) 的实验数据进行比较.
- 研究了几何参数对故障电压的影响.
主要成果:
- 射线测试显示了对照射的3D像素模块的高效率 (150V偏差).
- TCAD模拟准确地预测了泄漏电流和故障行为.
- 确定影响故障电压的几何参数 (n+柱半径,p++间隙).
结论:
- 小距离的3D像素传感器证明了LHC升级的卓越的辐射硬度和效率.
- TCAD模拟对于理解和减轻这些传感器中故障风险至关重要.
- 几何优化是最大限度地提高未来像素探测器的操作电压和寿命的关键.
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