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模块化批量生产12英寸过渡金属二二甲基因化物通过本地元素供应

Guodong Xue1, Xin Sui2, Peng Yin3

  • 1State Key Laboratory for Mesoscopic Physics, Frontiers Science Center for Nano-optoelectronics, School of Physics, Peking University, Beijing 100871, China.

Science bulletin
|July 12, 2023
PubMed
概括

研究人员开发了一种模块化增长战略,用于批量生产晶圆尺度二维 (2D) 过渡金属二二二烯化物 (TMD). 这种可扩展的方法使大面积TMD晶片的高质量,高产量制造成为可能,从而推动了集成电路的开发.

关键词:
两维材料是二维材料.300毫米的晶圆片批量生产是批量生产.组合工程是构成工程的.异构结构就是异构结构.

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