在半极112 ̄2 InGaN/GaN多量子中表面波动和发光特征之间的相关性
Mi-Hyang Sheen1, Yong-Hee Lee1, Jongjin Jang2
1Research Institute of Advanced Materials, Department of Materials Science and Engineering, Seoul National University, Seoul 08826, Republic of Korea.
Nanomaterials (Basel, Switzerland)
|July 14, 2023
概括
在蓝宝石基板上种植化/化 (InGaN/GaN) 多量子井导致表面波动. 面表现出不同的合物,其中一个面表现出大约4%的含量比另一个高.
科学领域:
- 材料科学 材料科学 材料科学
- 固态物理 固态物理
- 半导体异构结构 半导体异构结构
背景情况:
- 化/化 (InGaN/GaN) 多量子井 (MQW) 对于光电子设备至关重要.
- 在半极基板上生长,如m平面 (1-100) 蓝宝石,可以导致复杂的表面形态和面状形成.
- 了解这些方面对的结合差异是优化设备性能的关键.
研究的目的:
- 在半极 (1-100) 蓝宝石上种植的InGaN/GaN MQW的结构和发光特性.
- 分析MQW中形成的两个不同的方面之间的合物的差异.
- 为了将结构特征与发光行为相关联.
主要方法:
- 在半极m平面 (1-100) 蓝宝石基板上InGaN/GaN MQWs的生长.
- 传输电子显微镜 (TEM) 用于结构分析.
- 阴极发光 (CL) 光谱仪用于发光的特征.
- 用于度分析的X射线产量和环状暗场成像.
主要成果:
- 在InGaN/GaN MQW中观察到表面波动和两个不同的方面 (与112 ̄2和011 ̄1平行).
- 在这两个方面之间,在合物中发现了显著的差异.
- 定量分析显示,在相同的生长条件下,在011 ̄1方面与112 ̄2方面相比,在011 ̄1方面合的含量大约高出4个百分点.
结论:
- 在半极基板上种植的InGaN/GaNMQW中,依赖面积的的纳入是影响材料性质的关键因素.
- 观察到的度差异可以归因于各面的不同晶体学方向.
- 优化生长条件以控制面形成和分布对于开发基于InGaN的高性能光电子设备至关重要.
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