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Updated: Jul 22, 2026

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使用MEMS工艺制造的薄膜pH传感器的制造和性能

Yuzhen Guo1, Zengxing Zhang2,3, Bin Yao1

  • 1State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.

Sensors (Basel, Switzerland)
|July 14, 2023
PubMed
概括

开发了一种使用氧化 (Ta2O5) 膜的新型电容pH传感器. 这种微型传感器为水质监测提供了高精度和防干扰.

关键词:
我们的Ta2O5O5容量级的pH值传感器迷你化的迷你化电位计法是一种电位计法.

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