(III) 胺基酸盐:以Mo为基础的材料的合成,表征和蒸汽阶段生长
Thomas E Shaw1,2, Zahra Ali3, Taylor M Currie1
1Department of Chemistry, University of Central Florida, Orlando, Florida 32816, United States.
ACS applied materials & interfaces
|July 14, 2023
概括
一个新的 (III) 复合物Mo (iPr-AMD) 3显示出极好的热稳定性和挥发性. 这使得它成为通过化学蒸汽沉积和原子层沉积进行先进材料合成的有希望的前体.
科学领域:
- 无机化学 无机化学
- 材料科学 材料科学 材料科学
- 纳米技术 纳米技术
背景情况:
- 过渡金属的三胺酸复合物在材料合成中至关重要.
- 在科学文献中,同质单核 (III) 复合体是罕见的.
- 基于的材料对于各种技术应用至关重要.
研究的目的:
- 为了合成和表征三,N,N'-di-异乙胺酸,,III,Mo,iPr-AMD) 3.
- 评估Mo(iPr-AMD) 3作为化学蒸气沉积 (CVD) 和原子层沉积 (ALD) 的前体.
- 填补了关于过渡金属的文献中的空白.
主要方法:
- 合成和特征的Mo(iPr-AMD) 3.
- 热重力测量分析 (TGA) 用于确定热稳定性和挥发范围 (200-314°C).
- 气溶辅助的CVD和ALD实验使用Mo(iPr-AMD) 3前体.
主要成果:
- 摩 (iPr-AMD) 3 具有出色的挥发性质.
- 在500°C时通过气溶辅助的CVD成功增长MoO3膜.
- 在200°C时,超薄膜的ALD生长潜力已被证明.
结论:
- Mo(iPr-AMD) 3是一种稳定,高温的CVD和ALD的前体.
- 该综合体为合成基于的材料提供了一条新的途径.
- 这项研究扩大了过渡金属三胺酸盐化学的范围.
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