全介电元面的多频段光学共振,以高性能紫外线传感为导向
Jie Zheng1, Cheng Zhang1, Hong Li1
1Laboratory of Micro-Nano Optics, College of Physics and Electronic Engineering, Sichuan Normal University, Chengdu 610101, P. R. China. zhengjie@sicnu.edu.cn.
Physical chemistry chemical physics : PCCP
|July 18, 2023
概括
为了增强传感,制造了高度均的化 (Si3N4) 全介电元表面. 这些平台表现出局限于表面的热点和对紫外线和可见光检测的高灵敏度.
科学领域:
- 纳米光子学和超表面工程
- 化学和生物传感技术.
背景情况:
- 全介电传感器为等离子传感器提供了低损耗的替代品.
- 现有的介电传感器往往将电磁能量局限于内部,从而限制了表面的灵敏度.
- 将电磁热点转移到介电元表面的表面是一个重大挑战.
研究的目的:
- 开发用于传感应用的高度均的化 (Si3N4) 全介电元表面.
- 设计超表面,将电磁热点限制在纳米粒子表面.
- 研究这些超表面在紫外线和可见光谱中的传感性能.
主要方法:
- 使用纳米圈自组装制造Si3N4全介电元面的制造.
- 利用等离子增强化学蒸汽沉积 (PECVD) 来进行材料沉积.
- 采用实验测量和模拟来分析光学共振模式和场限制.
主要成果:
- 在紫外线和可见区域实现了高度均的Si3N4全介电超表面,具有多个光学共振模式.
- 成功地将电磁热点定位到Si3N4纳米颗粒表面的空隙中.
- 根据折射率变化的反应,证明的特征波长变化,达到707nm/RIU的痕迹检测灵敏度.
结论:
- 制造的Si3N4全介电超表面有效地将热点限制在表面上,克服了以前的限制.
- 这些超表面具有高灵敏度,适合在紫外线和可见波长中进行痕迹检测.
- 拟议的超表面为高通量制造先进传感基板提供了一个有前途的平台.
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