增强基于投影的代学习控制:一个集成成员的方法

Li Li1, Hongyang Zhao1, Fazhi Song1

  • 1Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China; Key Lab of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin 150080, China.

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|July 20, 2023
PubMed
概括

基于投影的代学习控制 (P-ILC) 提高了晶圆阶段的性能. 集成集成频域 ILC (SM-F-ILC) 提高了重复性和非重复性错误补偿,实现了更快的不确定性趋同.

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