概括
一种新的类似的人工磁导体 (M-AMC) 结构有效地抑制了CMOS Terahertz (THz) 探测器中的交叉声. 这项创新通过减少噪音和提高统一性,显著提高了探测器阵列性能.
科学领域:
- 特拉赫兹 (THz) 技术的使用.
- 半导体设备物理学 半导体设备物理
- 电磁学 电磁学 电磁学 电磁学
背景情况:
- 在CMOS THz探测器阵列中的交叉声阻碍了性能.
- 在芯片上的天线集成对交叉通话抑制提出了挑战.
- 提高探测器响应性和统一性对于阵列应用至关重要.
研究的目的:
- 开发一种用于抑制CMOSTHz探测器中的交叉通话的新型结构.
- 为了提高使用芯片上的天线的探测器阵列的性能.
- 为了研究类似的人工磁导体 (M-AMC) 对探测器性能的影响.
主要方法:
- 在CMOS工艺中使用Al和合Si设计和模拟类似的人工磁导体 (M-AMC) 结构.
- 制造0.65 THz检测器阵列,其中包含M-AMC结构和芯片上的天线.
- 探测器阵列的实验性表征,以评估交叉通话抑制和性能指标.
主要成果:
- M-AMC结构显著降低了相邻像素之间的电磁波传输系数.
- 模拟显示了M-AMC结构的目标像素的增强电场.
- 实验结果表明,中央频率的噪声等效功率 (NEP) 降低了315.5%.
- 在NEP的标准偏差系数下降了26.3%,表明统一性有所改善.
结论:
- M-AMC结构是抑制CMOSTHz探测器中交叉通话的有效方法.
- 开发的M-AMC结构提高了探测器的响应性和统一性,这对于高性能阵列至关重要.
- 这种方法为先进的高性能THz探测器阵列铺平了道路.
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