极大面积 (88毫米×88毫米) 的超导集成电路 (ELASIC)
Rabindra N Das1, Vladimir Bolkhovsky2, Alex Wynn2
1Quantum Information and Integrated Nanosystems Group, MIT Lincoln Laboratory, 244 Wood Street, Lexington, MA, 02421, USA. Rabindra.das@ll.mit.edu.
Scientific reports
|July 21, 2023
概括
我们通过相互连接多个高分辨率电路开发了一个极大的超导集成电路 (ELASIC). 这一突破使可扩展的冷计算成为可能,并推动了超导装置的制造.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 量子计算是一种量子计算.
背景情况:
- 超导集成电路 (IC) 为高速,低损耗的冷计算提供了潜力.
- 大面积超导IC的可扩展制造仍然是一个重大挑战,阻碍了实际应用.
研究的目的:
- 介绍一种用于制造极大面积超导集成电路 (ELASIC) 的新方法.
- 为了证明这种制造技术对先进的超导器件的可行性.
主要方法:
- 通过使用DUV和I线光刻的组合,相互连接16个深紫外线 (DUV EX4) 全网格电路.
- 使用I线网状接,创建一个88毫米×88毫米的ELASIC.
- 测试用于数据缓冲和传输的量子流量参数电路.
主要成果:
- 成功制造了一个88毫米×88毫米的ELASIC,比以前的超导IC大得多.
- 实现了电路特征的2X-12X减少,同时在线上保持高超导的关键电流.
- 证明了ELASIC内部数据处理的活性组件的功能.
结论:
- 开发的制造工艺克服了大面积超导IC生产的局限性.
- 这种方法对扩展超导量子比特和其他基于连接的设备有希望.
- ELASIC技术为更复杂和可扩展的冷计算系统铺平了道路.
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