MEMS,

Philip Schmitt1, Martin Hoffmann1

  • 1Microsystems Technology, Ruhr-Universität Bochum, Universitätsstr. 150, 44801 Bochum, Germany.

PubMed
概括

本研究介绍了用于MEMS传感器的静电机械放大器. 它降低了输入的刚度,并补偿了力,从而实现了精确的位移放大和可调的力传感.

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