化学电位梯度诱导在表轴TiN/MgO接口处形成基肯达尔空隙

Xiaoman Zhang1, W J Meng1, Andrew C Meng2

  • 1Department of Mechanical and Industrial Engineering, Louisiana State University, Baton Rouge, LA 70803, USA. wmeng1@lsu.edu.

Nanoscale
|July 27, 2023
PubMed
概括

在化 (TiN) /氧化 (MgO) 接口上观察到Kirkendall空隙,表明快速扩散. 这一发现表明了在薄膜接口中设计空缺职位的新方法.