使用PE CVD方法-结构和属性从碳烯基沉积的WC和CrC涂层
Marianna Trebuňová1, Daniel Kottfer2, Karol Kyziol3
1Department of Biomedical Engineering and Measurement, Faculty of Mechanical Engineering, Technical University of Košice, Letná 9, 042 00 Košice, Slovakia.
Materials (Basel, Switzerland)
|July 29, 2023
概括
这项研究比较了碳化物 (WC) 和碳化物 (CrC) 的涂层,揭示了WC涂层与CrC涂层相比具有更高的硬度和更低的磨损率.
科学领域:
- 材料科学 材料科学 材料科学
- 表面工程是什么?表面工程是什么?
- 纳米技术 纳米技术
背景情况:
- 先进的涂层对于在苛刻的应用中提高材料性能至关重要.
- 增强等离子体化学蒸汽沉积 (PECVD) 是制造薄膜的一种多功能技术.
- 碳化 (WC) 和碳化 (CrC) 是具有不同特性的重要陶材料.
研究的目的:
- 为了比较分析WC和CrC涂层的结构,机械和tribological特性.
- 研究PECVD沉积参数对涂层形态学的影响.
- 评估这些涂料在耐磨应用中的潜力.
主要方法:
- 使用PECVD与六碳烯前体进行WC和CrC涂层的沉积.
- 涂层厚度,微观结构和元素组成的表征.
- 测量硬度,模量,摩擦系数和磨损体积.
主要成果:
- 无论是WC还是CrC涂层,都实现了大约1.5μm的厚度.
- WC涂层表现出具有球状纳米颗粒的微柱状结构,而CrC涂层显示出类似花菜的形态.
- 与CrC涂层相比,WC涂层表现出更高的硬度 (9.2 GPa) 和模量 (440.2 GPa) 相比,CrC涂层 (分别为7.5 GPa和280 GPa).
- 卫生间涂层的磨损体积明显低 (-1.6 × 10^6 μm3) 比CrC涂层 (-18.84 × 10^6 μm3) 低.
结论:
- PECVD是有效的沉积密集的WC和CrC涂层与不同的微观结构.
- 在测试条件下,WC涂层与CrC涂层相比,具有优越的机械性能和耐磨性.
- 研究结果表明,WC涂层更适合用于需要高耐久性和低摩擦的应用.
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