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通过孔设计理想的LiNbO3A1共振器
Shu-Mao Wu1, Chen-Bei Hao1, Zhen-Hui Qin1
1National Laboratory of Solid State Microstructures, Department of Materials Science and Engineering, Nanjing University, Nanjing 210093, China.
Micromachines
|July 29, 2023
概括
这项研究在尼酸盐 (LiNbO3) 共振器中引入了亚波长穿孔,以抑制虚假模式. 这种方法提高了共振器的性能和稳定性,用于先进的过器应用.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 声学设备 声学设备
背景情况:
- 酸 (LiNbO3) 是先进电子设备的一个关键材料.
- 现有的LiNbO3共振器存在虚假模式,限制了性能.
- 提高共振器稳定性和设计灵活性对于实际应用至关重要.
研究的目的:
- 提出并验证一种实现理想LiNbO3 A1共振器的方法.
- 为了抑制LiNbO3共振器中的所有不利的虚假模式.
- 为了提高 LiNbO3 基过器的整体性能和适用性.
主要方法:
- 在LiNbO3表面的数字间传感器 (IDT) 电极之间引入亚波长穿孔.
- 这种方法与各种IDT电极参数和LiNbO3厚度兼容.
- 该技术不需要额外的制造步骤.
主要成果:
- 在LiNbO3 A1共振器中完全抑制所有不利的虚假模式.
- 在LiNbO3薄膜的悬浮面积显著减少.
- 增强了设计灵活性,紧性,机械和温度稳定性以及功率耐受性.
结论:
- 拟议的透孔方法有效实现了理想的LiNbO3 A1共振器.
- 这种技术在共振器特性上提供了实质性的改进.
- 预计它将显著推进LiNbO3 A1过器和Lamb波波过器的实际应用.
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