研究微造电磁线圈在Si MEMS可拆卸可回收安全和武装装置中的应用
Sining Lv1, Hengzhen Feng1, Wenzhong Lou1
1Science and Technology on Electromechanical Dynamic Control Laboratory, School of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, China.
Micromachines
|July 29, 2023
概括
本研究介绍了一种新的微电子机械系统 (MEMS) 安全和武装 (S&A) 装置. 它的特点是低驾驶能量,双稳定可回收性和快速响应,提高了安全系统的性能.
科学领域:
- 微电子机械系统 (MEMS) 是一种微电子机械系统.
- 材料科学 材料科学 材料科学
- 电磁学 电磁学 电磁学 电磁学
背景情况:
- 现有的安全和武装 (S&A) 设备通常需要高的驱动能量,并且缺乏可回收性.
- 在安全系统中需要小型化,节能和可靠的S&A解决方案.
研究的目的:
- 提出和验证一个低驱动能量的,可复位可回收的MEMS S&A设备.
- 优化U形电磁线圈 (USEC) 的设计,以提高驾驶能力和可靠性.
主要方法:
- 利用微型造和深蚀刻技术进行制造.
- 为USEC.EC开发了一种电磁机械合数学模型.
- 进行了MEMS S&A设备的制造,参数验证和性能测试.
主要成果:
- 实现了一个紧的MEMS S&A设备尺寸 (13 × 13 × 0.4) mm.
- 设计的USEC模型产生了15mN的稳定电磁驱动力,在8V/0.5A时的0.5mm行驶距离.
- 实验测试证实了S&A设备的驾驶能力和解除能力.
结论:
- 拟议的MEMS S&A设备展示了低驾驶能耗,可比式可回收性和快速响应.
- 与现有的S&A解决方案相比,该设计提供了强大的适应性和更好的性能.
- 这种技术可用于先进的安全系统要求.
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