一个MEMS陀螺仪振动系统的跳动和拉入不稳定性
1School of Mechanical Engineering, Shanghai Institute of Technology, Shanghai 201418, China.
Micromachines
|July 29, 2023
概括
静电微型陀螺仪的跳动和拉动不稳定性是由非线性动力学引起的. 驱动交流电压振幅的增加可以触发和恶化拉动不稳定性,影响可靠性.
科学领域:
- 非线性动力学是一种非线性动力学.
- 微电机系统 (MEMS) 是指微电机系统.
背景情况:
- 跳跃和拉入不稳定性是影响静电微型陀螺仪性能和安全性的关键非线性现象.
- 了解这些最初敏感的行为对于提高设备可靠性至关重要.
研究的目的:
- 探索微陀螺仪系统的全球动态与非线性刚性和静电力.
- 研究导致静态和动态拉动不稳定的条件.
主要方法:
- 进行了静态和动态分析,以确定拉动电压值.
- 在驾驶和检测模式中分析主共振和1:1内部共振.
- 应用梅尔尼科夫方法来分析拉入不稳定条件 (异临床分叉).
主要成果:
- 高驱动交流电压振幅可以通过-节点分叉来诱导双稳定周期反应.
- 初始状态的干扰可以导致吸引子之间的跳跃,吸引力盆地证明了这一点.
- 拉入不稳定性与异质临床分叉有关,并因驱动交流电压幅度增加而加剧.
结论:
- 该研究提供了对微陀螺仪非线性动态的全球视角.
- 拉入不稳定性与驱动交流电压振幅和非线性系统行为直接相关.
- 结果为提高静电微型陀螺仪的性能可靠性和结构安全性提供了见解.
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