一种基于虚拟加速的MEMS共振加速器的尺度因子校准方法
Zhaoyang Zhai1,2, Xingyin Xiong1, Liangbo Ma1,2
1The State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.
Micromachines
|July 29, 2023
概括
这项研究引入了一种新的尺度因子校准,用于使用虚拟加速度的加速度计,减少校准误差和提高温度稳定性. 这种方法为传统的高精度仪器校准提供了更有效的替代方案.
科学领域:
- 仪器仪表和测量仪器的使用
- 微电子机械系统 (MEMS) 是一种微电子机械系统.
背景情况:
- 传统的加速度计需要使用高精度仪器进行频繁,繁忙的校准.
- 尺度因子误差和温度漂移是加速度计的关键性能限制.
研究的目的:
- 开发一种高效的尺度因子校准方法,用于使用虚拟加速的微机共振加速度计 (MRA).
- 分析错误传输模型并优化MRA的几何参数.
- 为了弥补尺度因子的错误,并减少温度漂移.
主要方法:
- 通过电压信号模拟惯性力,使用静电力产生虚拟加速.
- 对错误传递模型的系统分析.
- 为新型MRA优化几何参数.
- 使用虚拟加速进行尺度因子补偿.
主要成果:
- 在±1g范围内达到0.46%的尺度因子校准误差,优于传统的地球引力场滚动校准.
- 在补偿后,在40°C至80°C范围内,最大尺度因子温度偏移从2.46 Hz/g降至1.02 Hz/g.
结论:
- 拟议的基于虚拟加速的校准方法显著提高了加速度计的准确性和稳定性.
- 这种技术为加速度计校准提供了更实用和更有效的方法,减少了对外部高精度设备的依赖.
相关概念视频
Measuring Acceleration Due to Gravity
596
Consider a coffee mug hanging on a hook in a pantry. If the mug gets knocked, it oscillates back and forth like a pendulum until the oscillations die out.
A simple pendulum can be described as a point mass and a string. Meanwhile, a physical pendulum is any object whose oscillations are similar to a simple pendulum, but cannot be modeled as a point mass on a string because its mass is distributed over a larger area. The behavior of a physical pendulum can be modeled using the principles of...
A simple pendulum can be described as a point mass and a string. Meanwhile, a physical pendulum is any object whose oscillations are similar to a simple pendulum, but cannot be modeled as a point mass on a string because its mass is distributed over a larger area. The behavior of a physical pendulum can be modeled using the principles of...
596
Instrument Calibration
219
Instrument calibration is essential for ensuring that instruments produce accurate and consistent results. It is vital in manufacturing, healthcare, testing laboratories, and scientific research. Calibration processes are specific to each instrument and help enhance data accuracy. Each instrument has a unique calibration process tailored to its design and function to improve data accuracy.
Analytical Balance Calibration
An analytical balance measures mass and requires regular calibration to...
Analytical Balance Calibration
An analytical balance measures mass and requires regular calibration to...
219
Scaling
278
In designing and analyzing filters, resonant circuits, or circuit analysis at large, working with standard element values like 1 ohm, 1 henry, or 1 farad can be convenient before scaling these values to more realistic figures. This approach is widely utilized by not employing realistic element values in numerous examples and problems; it simplifies mastering circuit analysis through convenient component values. The complexity of calculations is thereby reduced, with the understanding that...
278
Relative Motion Analysis using Rotating Axes - Acceleration
355
Consider a component AB undergoing a linear motion. Along with a linear motion, point B also rotates around point A. To comprehend this complex movement, position vectors for both points A and B are established using a stationary reference frame. The absolute velocity of point B is determined by adding the absolute velocity of point A, the relative velocity of point B in the rotating frame, and the effects caused by the angular velocity within the rotating frame.
Time differentiation is...
Time differentiation is...
355


