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Atomic Force Microscopy

Atomic Force Microscopy

Atomic force microscopy (AFM) is a type of scanning probe microscopy that can analyze topographic details of various specimens like ceramics, glass, polymers, and biological samples. AFM offers over 1000 times more resolution than the optical imaging system. Images generated from AFM are three-dimensional surface profiles, offering an advantage over the flat, two-dimensional images from other imaging techniques.
The AFM Probe
The probe is regarded as the heart of any AFM setup and comprises the...

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相关实验视频

Updated: Jul 21, 2025

Atomically Traceable Nanostructure Fabrication

Atomically Traceable Nanostructure Fabrication

Published on: July 17, 2015

一种方法来实现基于超精密加工微结构的纳米尺度视觉定位测量.

Yihan Chen¹, Honglu Li¹, Zijian Zhu¹

¹School of Mechanical Engineering and Automation, Harbin Institute of Technology, Shenzhen 518055, China.

|July 29, 2023

概括

复杂的表面形态增强了微观视觉测量的精度. 结合SURF和模板匹配算法,可以实现54纳米的重复性,用于超精密的加工测量.

科学领域:

计量学和地表工程计量学和地表工程
光学测量技术的使用

背景情况:

微观视觉测量对于精密工程至关重要.
图像注册算法和观察到的形态显著影响测量准确性和速度.
表面微观结构分析是理解材料特性的关键.

研究的目的:

分析表面形态对图像注册算法的影响.
为了确定最佳的观测对象,进行准确的微观测量.
开发一种改进的图像记录方法,用于超精确的测量.

主要方法:

研究了表面形态复杂性和图像记录精度之间的关系.
评估了微观视觉测量的常见图像注册算法.
开发了一种混合方法,使用SURF算法进行初始对齐和模板匹配,并通过插值进行精确的测量.

主要成果:

复杂的表面形态提供了更多的功能,提高了图像注册的准确性.
拟议的混合方法 (SURF +模板与插值匹配) 显示出高性能.
在25μm平面位移测量时,达到大约54nm的重复度.

结论:

关键词:

图像注册算法图像注册算法微观结构的微观结构精确度测量测量的精确度.

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具有复杂微观结构的超精密加工表面非常适合微观视觉测量.

结合的SURF和模板匹配算法为高精度测量提供了强大而准确的解决方案.

这种方法显著提高了微观视觉测量的可重复性和准确性.