微加工的TSV用于超小型压力传感器的后侧互连
Weiwen Feng1,2, Peng Li1,3, Haozhi Zhang1,2
1State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.
Micromachines
|July 29, 2023
概括
本研究介绍了一种超小的绝对压力传感器,使用微加工的透过通道 (TSV) 进行后侧互连. 这种设计提高了可靠性,并为灵活的应用提供了高分辨率的触觉传感.
科学领域:
- 微电子机械系统 (MEMS) 是一种微电子机械系统.
- 传感器技术 传感器技术
- 材料科学 材料科学 材料科学
背景情况:
- 传统的压力传感器往往具有脆弱的前侧导线,限制了它们在直接接触应用中的使用.
- 对于高空间分辨率和强大的触觉传感的需求正在增长,特别是在灵活和可穿戴的电子产品中.
- 现有的解决方案在小型化和密集包装的可靠互连方面扎.
研究的目的:
- 开发一个具有后侧互连的超小型绝对压力传感器.
- 为了提高传感器的可靠性,并实现高性能,高空间分辨率的接触式压力传感.
- 为了促进压力传感器的柔性基板应用和密集包装.
主要方法:
- 使用微孔插入和密封 (MIS) 技术制造超小型压力传感器 (0.4mm × 0.6mm).
- 集成的微加工通过 vias (TSVs) 的后侧信号互连.
- 一个单晶梁岛结构的设计,以增强线性和减少隔膜偏移.
主要成果:
- 实现了0.4mm × 0.6mm的超小传感器尺寸.
- 在3.3V供应电压下,具有0.84mV/kPa的高灵敏度.
- 在120kPa范围内显示的低非线性度为±0.09%的全尺度 (FS).
结论:
- 开发的超小型压力传感器与后侧互连的TSVs为直接接触传感提供了强大的解决方案.
- 该设计消除了脆弱的前侧导线,提供了一个平坦的,被动化的表面,以提高可靠性.
- 这项技术对触觉传感应用,包括可穿戴设备的灵活传感器,显示出重大前景.
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