用于测量非常低静态压力测量的法布里-佩罗干扰仪
Sergio Calixto1, Roberto Zitzumbo2, Zacarías Malacara Hernandez1
1Centro de Investigaciones en Óptica, Loma del Bosque 115, Leon 37150, Mexico.
Sensors (Basel, Switzerland)
|July 29, 2023
概括
这项研究调整了Fabry-Perot干扰仪来测量低压. 该仪器通过观察膜引起的干扰边缘的变化来检测压力变化.
科学领域:
- 光学物理学 光学物理学
- 计量学 计量学 计量学
- 仪器化 仪器化 仪器化
背景情况:
- 精确测量低压在各种科学和工业应用中至关重要.
- 传统的压力传感器可能对非常低的压力有敏感度或范围的限制.
研究的目的:
- 适应和使用法布里-佩罗干扰仪来精确测量非常低的压力.
- 为了证明使用光学干扰模式用于压力传感的可行性.
主要方法:
- 建造了一种具有高反射率镜子和金属室的法布里-佩罗干扰仪.
- 嵌入一个灵活的膜在一个室面,与一个镜子附着.
- 观察并测量了通过镜子穿过的光产生的同心圆形干扰的位移.
- 与室内的压力变化相关的边缘位移,以创建一个校准图.
主要成果:
- 调整后的法布里-佩罗干扰仪成功检测出压力变化.
- 最低可测量的压力在几十帕斯卡尔的范围内实现.
- 边缘位移与压力变化直接相关,使校准成为可能.
结论:
- 法布里-佩罗干扰仪是一种可行的光学仪器,用于测量非常低的压力.
- 使用膜的设计为压力传导提供了一种敏感的方法.
- 这种技术为低压计量学提供了一种新的方法.
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