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一种用于测量SEM中电子辐射下介电物的充电动力学的新方法

E I Rau1, A A Tatarintsev1, E Yu Zykova1

  • 1M.V.Lomonosov Moscow State University, Faculty of Physics, Leninskie Gory, Moscow 119991, Russia.

Micron (Oxford, England : 1993)
|August 2, 2023
PubMed
概括

一种新方法测量了电子辐射期间的介电电荷潜力,使用反向分散的电子信号. 该技术对扫描电子显微镜屏幕上的信号进行校准,以进行准确的分析.

关键词:
充电动力学 充电动力学介电材料的电子束充电方式扫描电子显微镜扫描电子显微镜表面潜在的表面潜力.

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相关概念视频

Scanning Electron Microscopy01:07

Scanning Electron Microscopy

A scanning electron microscope (SEM) is used to study the surface features of a sample by using an electron beam that scans the sample surface in a two-dimensional manner. Typically, areas between ~1 centimeter to 5 micrometers in width can be imaged. SEM can be used to image bacteria, viruses, tissues as well as larger samples like insects. Conventional SEM gives a magnification ranging from 20X to 30,000X and spatial resolution of 50 to 100 nanometers.
Fundamental Principles
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