对 perfluoroalkoxy 基泉的动态特性进行研究
Jing Ni1, Yujie Feng1, Zhi Cui1
1School of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China.
在半导体清洗系统中, perfluoroalkoxy alkane (PFA) 弹的动态性能取决于频率. 更高的频率会增加弹的刚性,但长时间使用会影响性能,特别是在特定的频率.
科学领域:
- 材料科学 材料科学 材料科学
- 机械工程 机械工程
- 半导体制造业 半导体制造业
背景情况:
- perfluoroalkoxy alkane (PFA) 弹是半导体清洗系统超清流量控制中的关键组件.
- 这些PFA弹的动态性能对于高效的系统运行至关重要,但通常会受到运行频率的影响.
研究的目的:
- 研究不同工作频率对PFA弹动态性能的影响.
- 分析周期性加载频率与PFA弹的动态刚度和歇斯底里系数之间的关系.
主要方法:
- 压缩循环实验是在单轴侧侧刺激下进行的.
- 分析了力位移曲线以确定不同频率的动态刚度.
- 歇斯底里曲线被用来评估在各种循环负载条件下的歇斯底里系数.
- 长期测试 (200万次压缩周期) 评估了动态刚度,歇斯底里系数和弹高度的变化.
主要成果:
- 随着操作频率的增加,PFA弹的动态刚度会增加.
- 歇斯底里系数在10 Hz时达到峰值,在6 Hz时最低.
- 在200万个循环后,最大的动态刚度减弱 (4.19%) 发生在8 Hz.
- 在6Hz时观察到最显著的歇斯底里系数减弱 (42.1%) 是6Hz.
结论:
- 运行频率显著影响PFA弹的动态特性.
- 了解依赖频率的行为和长期降解对于优化PFA弹设计和半导体设备中的应用至关重要.
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