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通过粗略的相位步骤进行光学衍光度量

Morteza Jafari Siavashani¹, Elyas Nasimdoust², Parviz Elahi³

¹Department of Physics, Sharif University of Technology, Tehran, 11155-9161, Iran.

Scientific reports

|August 12, 2023

概括

使用相位步骤的光学衍光度计 (OD) 是干扰度计的抗振替代品. 这项研究表明,阶段级表面粗度会影响OD衍射模式,但可以保留关键特征.

科学领域:

计量学计量学计量学
光学工程是指光学工程.
衍射物理衍射物理

背景情况:

光学衍光度 (OD) 为干扰度提供了一个替代方案,对环境振动的敏感性降低.
OD应用依赖于通过相位相生成的弗雷内尔衍射模式来测量物体.
之前的工作表明,OD不需要无限利的相位步骤.

研究的目的:

为了研究阶段级表面粗度和不平面度对光学衍光度量的影响.
确定表面缺陷的可接受极限,以保持OD特性.
建立衡量标准来评估从粗略和理想相阶段的衍射模式之间的相似性.

主要方法:

阶段级表面粗度与衍射模式特征之间的关系的理论推导.
对衍射模式特征的分析,包括可检测的边缘数和自相关函数.
通过数值模拟和实验测量进行验证.

主要成果:

阶段阶段表面粗度和不平坦度显著影响OD衍射模式.
粗度的程度会影响保存OD衍射模式特征.
可检测的边缘数和自相关函数是评估模式相似性的有效措施.

结论:

光学衍光度是坚固到一定水平的阶段阶段表面粗度.
了解表面缺陷的影响对于可靠的OD应用至关重要.
理论模型和实验验证证证了粗度对OD性能的影响.

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