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描述超宽视野的3D原子探测器的性能

Levi Tegg¹, Andrew J Breen¹, Siyu Huang¹

¹School of Aerospace, Mechanical and Mechatronic Engineering, The University of Sydney, Camperdown, NSW 2006, Australia; Australian Centre for Microscopy and Microanalysis, The University of Sydney, Camperdown, NSW 2006, Australia.

Ultramicroscopy

|August 13, 2023

概括

新的CAMECA Invizo 6000原子探针显微镜提供了比以前的模型更广泛的视野和更高的样本产量. 这种先进的仪器非常适合分析大容量,包括氧化物等具有挑战性的材料.

科学领域:

材料科学材料科学材料科学
分析化学分析化学
显微镜的使用方法

背景情况:

原子探头断层扫描 (APT) 是一种在原子尺度上进行3D材料表征的强大技术.
现有的仪器,如局部电极原子探测器 (LEAP),对某些材料的视野和样本产量有局限性.
离子光学和激光技术的进步对于提高APT性能至关重要.

研究的目的:

为了描述CAMECA Invizo 6000原子探针显微镜的性能.
以视野,质量分辨能力和样本产量来评估其能力.
评估其适合分析各种材料,包括具有挑战性的样本.

主要方法:

使用了一个CAMECA Invizo 6000原子探头显微镜.
采用双反平行深紫外线激光器和独特的镜头系统.
在模型Al-Mg-Si合金,基于Ni的超级合金和Zr合金上测试了性能.
集成的空气和真空传输技术用于样品处理.

主要成果:

与LEAP 4000 X Si相比,Invizo 6000的视野明显增加.
观察到样品产量的显著改善,特别是Zr合金.
尽管视野扩大,但仍保持了质量分辨能力.

结论:

在CAMECA Invizo 6000的先进的离子光学增强分析能力.
该仪器非常适合大批量分析和难以分析的样品,如氧化物.
它代表了原子探头断层扫描研究的重大进步.

关键词:

原子探头显微镜的显微镜.空间分辨率的空间分辨率在真空转移的过程中,真空转移

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