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Sensitivity Enhancement of Soft Capacitive Pressure Sensors Using a Solvent Evaporation-Based Porosity Control Technique

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Published on: March 24, 2023

有图案的粘附层使得坚固的Pd-MIS气传感器成为可能.

Ryan Hood¹, Robert D Kolasinski¹, Brian Zutter¹

¹Sandia National Laboratories, Livermore, California 94550, United States.

ACS applied materials & interfaces

|August 22, 2023

概括

这项研究引入了一个有图案的中间层,以增强合金-金属-绝缘体-半导体 (Pd-MIS) 传感器的附着性. 这一创新提高了核聚变反应堆应用的机械完整性,而不妨碍探测.

关键词:

斯科特基二极管是如何使用的收费交换器的使用方法气传感器是一种气传感器.核聚变是核聚变的一种方式.帕拉是一种.有图案的粘附层的粘附层.

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科学领域:

材料科学材料科学材料科学
半导体物理半导体物理
核聚变能源工程核聚变能源工程

背景情况:

金属绝缘体半导体 (Pd-MIS) 传感器对于检测聚变反应堆中的电荷交换粒子至关重要.
(Pd) 和二氧化 (SiO2) 之间的粘合性差,限制了Pd厚度和传感器可靠性.
厚厚的Pd涂层是需要的高能粒子阻力在tokamaks,但容易发生机械故障.

研究的目的:

为Pd-MIS气传感器开发一种新的粘附策略.
为了提高Pd涂层的机械完整性,用于核聚变反应堆应用.
为了使用更厚的Pd层,而不会影响探测能力.

主要方法:

使用新型图案粘附层制造Pd-MIS设备.
在Pd和SiO2.2之间引入一个有图案的 (Cr) 介层.
对粘附性质和吸收的评估.

主要成果:

一个有图案的Cr中间层显著增强了Pd-SiO2接口的附着性.
有图案的中间层可以防止机械故障模式,如泡和脱落.
在SiO2-Pd接口上的吸收仍然可以访问,保持传感器功能.

结论:

有图案的Cr中间层是改善Pd-MIS传感器耐用性的可行解决方案.
这种方法允许更厚的Pd涂层,在恶劣的聚变环境中增强传感器的强度.
开发的传感器适用于测量托卡马克的电荷交换中性流动.