基于扫描电子显微镜进行分析的样本平面方向的确定:比较上下和侧向视图方法
Chunfei Li1, Joshua Craig1, Josiah Dubovi1
1Pennsylvania Western University, Clarion Campus, Clarion, Pennsylvania, USA.
Microscopy research and technique
|August 25, 2023
概括
本研究引入了新的上下和侧视方法,用于在扫描电子显微镜 (SEM) 中精确定位微尺度样本. 这些技术使得精确的表面分析具有附件,如能量分散式X射线光谱学.
科学领域:
- 材料科学 材料科学 材料科学
- 显微镜技术 显微镜技术
- 表面分析 表面分析
背景情况:
- 扫描电子显微镜 (SEM) 对于微观分析至关重要.
- 像能量分散式X射线光谱学这样的附件增强了SEM能力.
- 精确定位具有平面表面的标本对于这些附件至关重要,但具有挑战性.
研究的目的:
- 开发和验证在现场的方法来确定微尺度样本平面表面的方向在SEM.
- 为了实现精确的样本操纵,进行先进的SEM分析.
主要方法:
- 提出并测试了用于现场定位的自上而下和侧向视图方法.
- 上下方法:通过调整舞台旋转和倾斜来最大化投影面积.
- 侧视方法:在SEM图像上进行线性投影的调整阶段.
主要成果:
- 通过使用两种建议的方法,成功确定平面表面的方向.
- 测量到的表面之间的角度与晶体学预期有很高的一致性.
- 从上到下的方法实现了2.7°的精度,侧向视图在1.7°内.
结论:
- 开发的自上而下的和侧面视图方法为SEM中的样本定向提供了有效的现场解决方案.
- 这些技术有助于使用需要特定样本定向的高级SEM附件.
- 准确的方向确定对于详细的微观结构和晶体分析至关重要.
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