布局依赖压力调查通过玻璃通过插座架构使用子建模模拟技术和因数设计方法
Shih-Hung Wang1, Wensyang Hsu1, Yan-Yu Liou2
1Department of Mechanical Engineering, National Yang Ming Chiao Tung University, No. 1001, Ta Hsueh Road, East District, Hsinchu City 300010, Taiwan.
Micromachines
|August 26, 2023
概括
使用玻璃插座的多片块集成提供了低成本和高密度. 应力模拟揭示了环氧成型化合物厚度,并通过调度显著影响晶片器件固化和操作期间的热力学应力.
科学领域:
- 材料科学 材料科学 材料科学
- 机械工程 机械工程
- 电气工程 电气工程
背景情况:
- 多芯片技术是高密度集成的关键推动因素,在电力消耗和组件利用方面提供了优势.
- 玻璃插座为先进包装提供了对插座的经济有效的替代方案.
- 了解这些复杂结构中的热力学应力对于可靠性至关重要.
研究的目的:
- 为了研究使用玻璃插座的多片片系统中的热力学应力反应.
- 确定影响制造过程中压力产生的关键结构设计参数.
- 为了评估环氧成型化合物 (EMC) 和通过安排对应力分布的影响.
主要方法:
- 使用有限元素分析 (FEA) 进行以过程为导向的应力模拟,并进行元素激活/禁用.
- 亚建模技术来处理尺度不匹配和网格复杂性.
- 完整的因数设计与差异分析 (ANOVA) 来评估参数显著性.
主要成果:
- 通过侧壁填充Cu的最大第一主应力为130.75MPa,玻璃插座底部的最大应力为17.18MPa.
- 发现环氧成型化合物 (EMC) 厚度和透过玻璃通过杆是影响应力的主导因素.
- 在加热和冷却周期期间观察到显著的应力变化.
结论:
- 基于玻璃插座的多片片系统可用于成本效益高密度集成.
- 电磁共振 (EMC) 厚度和直径是关键的设计参数,必须优化以减轻热力学应力.
- FEA和ANOVA为先进的包装技术的可靠性提供了宝贵的见解.
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