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在SOI晶片中的残余应力的表征,使用MEMS杆梁

Haotian Yang1, Min Liu1, Yingmin Zhu1

  • 1School of Mechano-Electronic Engineering, Xidian University, Xi'an 710071, China.

Micromachines
|August 26, 2023
PubMed
概括

一种新的低成本机械建模方法准确地测量了在绝缘体 (SOI) 晶片中的残余应力,这对于微电机械系统 (MEMS) 设备的可靠性和性能至关重要.

关键词:
在MEMS MEMS中使用.这么多,这么多.杆杆梁梁可以使用.标志性特征的描述.剩余压力是一种残留压力.

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