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高效率和可靠价值的几何标准:集成周期结构参考材料

Chenying Wang^1,2, Di Liu^2,3, Yaxin Zhang^2,3

¹School of Instrument Science and Technology, Xi'an Jiaotong University, Xi'an 710049, China.

|August 26, 2023

概括

具有集成周期结构的新参考材料为光学仪器和微CT提供了扩展的校准能力. 这些材料可以实现高效,多值校准,精度提高和多种模式类型.

科学领域:

计量学和仪器仪表技术
材料科学材料科学材料科学
纳米制造的纳米制造

背景情况:

集成周期结构对于校准光学仪器和微型CT至关重要.
现有的参考材料在测量范围,图案多样性和校准参数方面存在局限性.

研究的目的:

开发具有增强校准功能的先进的综合周期结构参考材料.
克服当前用于光学和微CT校准的参考材料的局限性.

主要方法:

使用光刻法和感应合等离子体 (ICP) 蚀刻的制造.
在ICP蚀刻过程中分析结构形态变化的 MATLAB 模拟.
图像处理和快速里埃转换 (FFT) 用于计量分析.

主要成果:

实现了对线宽 (相对误差≤17.5%) 和周期 (相对误差≤1.5%) 的精确控制.
控制30至60微米的蚀刻深度,适用于各种网格线宽.
证明侧墙垂直度很高 (90° ± 0.8°,相对误差<0.9%).

结论:

开发了用于高效,多值校准的多功能参考材料.
新材料显著提高了光学仪器和微CT的校准精度和范围.
成功地解决了现有的周期结构参考材料的局限性.

关键词:

蚀刻深度蚀刻深度蚀刻深度综合集成的整合.线条宽度线条宽度线条宽度周期结构是周期结构.时间段时期时期参考材料是参考材料的参考材料.侧墙垂直性侧墙垂直性

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