工艺参数对Ag-2.35Au-0.7Pd-0.2Pt-0.1Cu合金线的粘合性能的影响
Hongliang Zhou1, Andong Chang1, Junling Fan2
1School of Mechanical and Power Engineering, Henan Polytechnic University, Jiaozuo 454000, China.
Micromachines
|August 26, 2023
概括
优化电气燃烧 (EFO) 电流和时间,以及超声波功率和粘合力,提高了基于Ag的合金电线的可靠性. 这项研究确保了高结合强度,并防止了微电子产品中的结合升起.
科学领域:
- 材料科学 材料科学 材料科学
- 金工业是金工业的一个方面.
- 微电子工程 微电子工程
背景情况:
- 微电子互连的可靠性至关重要.
- 基于Ag的合金电线为先进的应用提供了潜力.
- 了解债券形成是表现的关键.
研究的目的:
- 为了研究工艺参数对Ag-2.35Au-0.7Pd-0.2Pt-0.1Cu合金电线粘接的影响.
- 确定自由气球 (FAB) 形成和结合特征的最佳参数.
- 为了评估优化电线结合的可靠性和结合强度.
主要方法:
- 扫描电子显微镜 (SEM) 用于FAB变形分析.
- 电气灭火 (EFO) 电流和时间的系统变化.
- 控制调节超声波功率和粘合力.
- 用于结合强度评估的破坏性拉力测试和球剪切测试.
主要成果:
- 在25mA的EFO电流和650μs的EFO时间下,FAB形状得到了优化.
- FAB直径和EFO时间之间的非线性关系由立方方程描述.
- 确定了最佳参数:70 mW/45 gf用于球结合,90 mW/75 gf用于结合.
- 在拉力测试中没有观察到粘合升降;在剪切测试中,金属间化合物的覆盖率是完美的.
结论:
- 优化过程参数显著提高了纽带强度和可靠性.
- 含Pt的基于Ag的合金电线在微电子应用中表现出高性能.
- 这项研究为先进的结合线的可靠性研究提供了关键数据.
相关概念视频
Bonding in Metals
47.5K
Metallic bonds are formed between two metal atoms. A simplified model to describe metallic bonding has been developed by Paul Drüde called the “Electron Sea Model”.
47.5K
Thermal expansion and Thermal stress: Problem Solving
1.2K
San Francisco's Golden Gate Bridge is exposed to temperatures ranging from -15 °C to 40 °C. At its coldest, the main span of the bridge is 1275 m long. Assuming that the bridge is made entirely of steel, what is the change in its length between these temperatures?
To solve the problem, first, identify the known and unknown quantities. The initial length (L) of the bridge is 1275 m, the coefficient of linear expansion (α) for steel is 12 x 10-6/°C, and the change in...
To solve the problem, first, identify the known and unknown quantities. The initial length (L) of the bridge is 1275 m, the coefficient of linear expansion (α) for steel is 12 x 10-6/°C, and the change in...
1.2K
Bonding and Strength of Aggregate
216
The bond between aggregate particles and the cement matrix is significantly influenced by the shape and surface texture of the aggregates. High-strength concretes benefit from a rougher texture, which leads to stronger bonding due to greater adhesion. Angular aggregates with larger surface areas also enhance this bond. The bonding quality, however, is complex to assess as no universally accepted test exists. Good bonding is indicated when a crushed concrete specimen shows some aggregate...
216
Electrodeposition
667
Electrodeposition is a technique used to separate an analyte from interferents by electrochemical processes. Here, the analyte is a metal ion that can be deposited on an electrode immersed in the sample solution. The electrochemical setup consists of an anode and a cathode. When an electric current is applied to the setup, oxidation occurs at the anode. At the cathode, which consists of a large metal surface, metal ions undergo reduction and deposit onto the surface.
Electrodeposition can...
Electrodeposition can...
667


