一个具有两个操作状态的新前向偏差PIN马赫-泽恩德调制器
Hang Yu1,2, Donghe Tu1,2, Xingrui Huang1,2
1State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
Micromachines
|August 26, 2023
概括
本研究介绍了一种新型的马赫-泽恩德调制器 (MZM),具有两种可切换的操作状态,可实现高效率和高速度. 该设备实现了7GHz的电光带宽和15Gbps的数据速率,适用于先进的光学系统.
科学领域:
- 光子学和光电学和光电子学.
- 集成光学 集成光学 集成光学
- 半导体设备 半导体设备
背景情况:
- 马赫-泽恩德调制器 (MZM) 是光通信系统中至关重要的组件.
- 在单一设备中实现高调制效率和广泛的电光 (E-O) 带宽仍然是一个挑战.
- 光学为集成光学设备提供了一个可扩展的平台.
研究的目的:
- 为了证明一种新的向偏向的正与内在负 (PIN) 马赫-泽恩德调制器 (MZM).
- 在单个MZM中实现可切换的高效率和高速运行状态.
- 将PIN相变器与被动电阻和电容 (RC) 均等器集成,以提高性能.
主要方法:
- PIN-MZM的制造,其中包含一个PIN相变器和一个集成的RC等分器 (PIN-RC).
- 通过改变电信号加载位置来切换操作状态.
- 插入损失,调制效率和EO带宽的表征.
主要成果:
- 制造的调制器具有低插入损失 (1.29 dB) 和紧的设计 (500μm相位变速器长度).
- 实现了两个不同的操作状态,调制效率为0.0088V·cm (高效率) 和1.43V·cm (高速).
- 相应的3dB E-O带宽分别为200MHz和7GHz,并证明了成功的15GbpsNRZ调制.
结论:
- 开发的PIN-MZM提供了功能灵活性,可切换高效率和高速模式.
- 集成的PIN-RC等分器有效地扩展了EO带宽,同时保持了调制效率.
- 调制器的性能特性使其适用于光学交换机阵列和模拟信号处理中的应用.
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