通过原子层沉积生产的反反射涂层用于混合聚合物3D微光学
Darija Astrauskytė1, Karolis Galvanauskas2, Darius Gailevičius2
1Center for Physical Sciences and Technology, Savanorių av. 231, LT-02300 Vilnius, Lithuania.
Nanomaterials (Basel, Switzerland)
|August 26, 2023
概括
研究人员开发了一种用于使用激光直接写作 (LDW) 制造的混合聚合物微镜的反射涂层. 这种先进的涂层可以显著降低反射引起的光学功率损失,提高微光学性能.
科学领域:
- 光学和光子学 在光学和光子学.
- 材料科学 材料科学 材料科学
- 纳米技术 纳米技术
背景情况:
- 尽量减少光学功率损失对于高质量的光学来说至关重要,不必要的反射是主要原因.
- 激光直接写作 (LDW) 能够制造复杂的微光结构.
- 混合有机-无机材料为微光学提供了独特的特性.
研究的目的:
- 为了证明在不改变其几何形状的情况下,在LDW制造的混合聚合物微镜头上涂上反射涂层的可行性.
- 为了研究原子层沉积 (ALD) 与微光学LDW 3D多光子光刻的协同兼容性.
主要方法:
- 使用激光直接写作 (LDW) 制造混合聚合物微镜头.
- 通过原子层沉积 (ALD) 在微镜头上沉积反射涂层.
- 测量特定波长 (633 nm) 的反射减弱的光学特征.
主要成果:
- 成功地将抗反射涂层应用于LDW制造的混合聚合物微镜头上.
- 在SZ2080TM材料的633nm表面反射率从3.3%降至0.1%.
- 证明了ALD与LDW3D多光子光刻的兼容性. 证明了ALD与LDW3D多光子光刻的兼容性.
结论:
- ALD与LDW兼容,用于创建微光学上的反射涂层.
- 这种结合技术通过最小化反射来提高光学性能.
- 扩大了光学级子-100微米尺度微光学的应用.
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