一种与CMOS技术兼容的新型等离子金属半导体绝缘金属 (MSIM) 彩色传感器
A Beheshti Asl1, H Ahmadi1,2, A Rostami3,4
1Photonics and Nanocrystals Research Lab (PNRL), Faculty of Electrical and Computer Engineering, University of Tabriz, Tabriz, Iran.
Scientific reports
|August 28, 2023
概括
本研究介绍了使用等离子过器和PN二极管的高效RGB色彩探测器. 该设备为每个颜色实现了不同的电流密度,并且与CMOS技术兼容,用于各种应用.
科学领域:
- 光子学和光电子学.
- 材料科学用于传感应用.
- 半导体设备物理学 半导体设备物理
背景情况:
- 精确的颜色检测对于生物和工业应用至关重要,特别是在光子技术中.
- 确定光波特征,如波长,对于色彩感应至关重要.
- 现有的方法可能缺乏效率或对不同RGB颜色谱的单独检测能力.
研究的目的:
- 提出和设计一个高效的结构,用于分别检测红色,绿色和蓝色 (RGB) 的颜色.
- 调查基于等离子过器和PN二极管的新型色彩探测器的性能.
- 为了证明设计的探测器与CMOS技术的兼容性.
主要方法:
- 使用等离子过器来感知与红色,绿色和蓝光相应的特定波长.
- 集成PN二极管以将检测到的光子转换为可测量的电流.
- 通过测量不同输入光强度的电流密度来表征探测器的响应.
主要成果:
- 拟议的探测器在1mW/cm2的输入强度下,可以实现蓝色 (27μA/cm2),绿色 (35μA/cm2) 和红色 (48μA/cm2) 颜色的不同电流密度.
- 低输入强度 (蓝色为3.94μW/cm2,绿色为2.98μW/cm2,红色为2.25μW/cm2) 足以达到0.1μA/cm2的电流密度.
- 探测器表现出简单的波长调节性和在不同输入强度的线性操作.
结论:
- 开发的等离子过器和PN二极管结构为单独的RGB颜色检测提供了一种高效的方法.
- 该探测器的高灵敏度和CMOS兼容性使其适合集成到相机和显示器等设备中.
- 通过使用高精度光探测器结构,如PIN二极管,可以进一步提高灵敏度.
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