双背板CMUT具有宽带宽和低驱动电压,用于空中应用
概括
新型双背板电容微机超声波传感器 (CMUT) 为空中应用提供了更高的性能. 这些CMUT实现了高灵敏度和宽带宽,证明了它们在范围测量方面的潜力.
科学领域:
- 微电子机械系统 (MEMS) 是一种微电子机械系统.
- 声学转导是一种声学转导.
- 超声波传感器 超声波传感器
背景情况:
- 传统的电容微机超声波传感器 (CMUT) 面临着位移幅度和带宽的限制.
- 在空中声学应用中需要提高传感器性能.
研究的目的:
- 介绍使用双背板 (DBP) 技术的新型空中CMUT.
- 为了增强静电驱动,并在CMUT中实现宽,可调节的带宽.
- 为了证明DBP-CMUTs在空中测距的适用性.
主要方法:
- 开发一个三电极电容系统,在两个穿孔的对应电极之间设置一个膜.
- 整合了一个通风空气腔,以实现可调节的带宽.
- DBP-CMUT原型的制造和表征.
主要成果:
- 在84kHz的共振频率下,获得了34.5dB (V/Pa) 的高接收灵敏度和259nm/V的发射灵敏度.
- 由于来自通风腔的粘性消散,证明了29%的宽分带宽 (FBW).
- 成功检测到一个金属板的距离使用单个DBP-CMUT在收发器模式的脉冲回声测距.
结论:
- 与传统的CMUT相比,DBP-CMUT技术显著提高了位移幅度和带宽.
- 开发的CMUT适用于空中声学传感和距离应用.
- DBP-CMUT设计为未来超声波传感器开发提供了一个有前途的平台.
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