一个强大的无横移 (LSF) 电热微镜,具有灵活的多形体束
Hengzhang Yang1, Anrun Ren1, Yingtao Ding1
1School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing, 100081 China.
Microsystems & nanoengineering
|September 1, 2023
概括
这项研究引入了使用光敏聚胺 (PSPI) 而不是易碎的二氧化的强大的电热微镜. 新的PSPI微镜显著提高了对冲击和跌落的耐用性,扩大了它们的实际应用.
科学领域:
- 在MEMS技术方面,
- 材料科学是一种材料科学.
- 光学工程的光学工程.
背景情况:
- 标准的电热微镜使用二氧化 (SiO2) 进行隔离,二氧化易碎,限制了设备的强度.
- 设备的脆弱性限制了当前微镜技术的应用范围.
研究的目的:
- 通过加入聚合物材料来增强电热微镜的强度.
- 为了研究使用光敏聚胺 (PSPI) 的微镜的性能和耐用性.
主要方法:
- 设计和制造的电热微镜使用PSPI作为隔离和 anchor材料,部分取代SiO2.
- 进行了光学扫描角度和位移测试.
- 执行冲击,摔落和振动测试,以评估设备的生存能力.
主要成果:
- PSPI型微镜在4Vdc时实现了±19.6°的光学扫描角度和370μm的垂直位移.
- 微镜经受住了200g以上的加速 (冲击),从21厘米下跌 (掉落测试) 和显著的振动加速 (21g垂直,29g横向).
- 与同一个制造批次的SiO2基微镜相比,PSPI微镜的强度至少是4倍.
结论:
- 光敏聚胺 (PSPI) 是一种可行的材料,可以增强电热微镜的强度.
- 开发的基于PSPI的微镜提供了卓越的耐用性,克服了基于SiO2的传统设计的局限性.
- 这些强大的微镜在苛刻的环境中扩大了应用潜力.
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