五个低噪音稳定振荡器与相同的多模AlN/Si MEMS振荡器相关联
IEEE transactions on ultrasonics, ferroelectrics, and frequency control
|September 5, 2023
概括
这项研究展示了使用微电子机械系统 (MEMS) 技术的五个稳定振荡器. 这些振荡器与单个振荡器相关联,显示出用于时钟,计时和传感应用的有希望的性能.
科学领域:
- 电气工程 电气工程
- 材料科学 材料科学 材料科学
- 物理 物理学 物理
背景情况:
- 微电子机械系统 (MEMS) 共振器为频率控制提供高质量 (Q) 因素.
- 像上化 (AlN/Si) 等压电材料使MEMS设备中的高效转导成为可能.
- 多模共振器可以支持多个稳定的振荡频率,但它们在振荡器中集成使用具有挑战性.
研究的目的:
- 通过实验证明了多个自我维持的反振荡器,参考了一个单一的AlN/Si MEMS振荡器.
- 描述这些振荡器在不同共振模式中的相位噪声和频率稳定性.
- 为了研究振荡器性能对潜在应用的模式依赖性.
主要方法:
- 制造能够支持多个共振模式的AlN/Si MEMS共振器.
- 集成压电转导,以高效地读取10,30,65,95和233 MHz的共振模式.
- 建造和测试五个自持振荡器,每一个都锁定在一个独特的高Q共振模式.
- 对每个振荡器进行相位噪声和艾伦偏差的测量和分析.
主要成果:
- 成功演示了五个稳定,自我维持的振荡器,它们在10,30,65,95和233 MHz频率运行.
- 在共振模式中达到高的Q因子 (在10MHz时高达18,600).
- 测量低相噪声 (例如,10MHz振荡器在1kHz偏移时为-116dBc/Hz) 和良好的频率稳定性 (例如,65MHz振荡器在1s时为4x10^-9的艾伦偏差).
结论:
- 通过AlN/Si MEMS技术,可以从一个共振器创建多个稳定振荡器.
- 展示的振荡器在时钟,计时和传感应用中表现出有希望的性能.
- 这项工作为多模共振器的模式依赖噪声和稳定性提供了洞察力,这对未来的设备工程至关重要.
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