6-20 GHz 30% ScAlN 侧向场激发的横截面拉美模式共振器用于未来的移动射频前端
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Updated: Jul 17, 2025

10:26
Fabrication and Characterization of Superconducting Resonators
Published on: May 21, 2016
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IEEE transactions on ultrasonics, ferroelectrics, and frequency control
|September 7, 2023
概括
高性能的酸化 (ScAlN) 共振器实现了前所未有的6-20 GHz频率. 这项技术使得用于先进的无线电频率前端的紧型,低损耗的微声学过器能够大规模生产.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 物理 物理学 物理
背景情况:
- 无线电频率前端 (RFFEs) 需要先进的微声学过器来实现下一代无线通信.
- 现有的技术面临频率范围,损失和带宽的限制,适用于新兴应用.
研究的目的:
- 为大规模生产低损耗,宽带和紧的微声波过器件开发一个技术平台.
- 为了证明30%的酸化 (ScAlN) 在侧面场激发的横截面Lame'模式共振器 (CLMR) 的性能.
主要方法:
- 使用一个简单的三面罩,后CMOS兼容的工艺制造30%的ScAlNCLMR.
- 响应频率的刻版调整和几何参数的调查 (连接,宽度与长度比).
- 统计分析以优化设备几何学以获得最大质量因子 (Q).
主要成果:
- 在6-20 GHz范围内实现了前所未有的性能,在优点数据中超过了最先进的技术状态.
- 已证明的高晶度30%的ScAlN层产生了具有高Q和高电机学合 (kt2) 的共振器.
- 确定一个完全绑定的设备配置为优越功率线性 (PL),较低温度频率系数 (TCF) 和更高的设备产量最佳.
结论:
- 拟议的ScAlN LFE CLMR技术平台可用于手机的先进微声学过器的大规模生产.
- 该技术成功地超越了5G频段,为毫米波频率提供了一条途径.
- 通过更高的兴奋剂水平和频率进行进一步扩展,可以提高未来RFFEs的过器性能.
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