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Updated: Jul 17, 2025

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通过循环吸附和去除1 - 中的区域选择性沉积

Josiah Yarbrough1, Stacey F Bent1,2

  • 1Department of Chemical Engineering, Stanford University, Stanford, California 94305, United States.

The journal of physical chemistry. A
|September 8, 2023
PubMed
概括

1-尼托作为一个选择性抑制剂对铜表面的原子层沉积 (ALD). 一个新的多步骤工艺使得在低温下对而不是铜进行区域选择性Al2O3ALD.

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